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PUBLIC DATA DEFINITIONS

ASML Holding KPI & segment coverage

Operating KPI and segment definitions available for ASML Holding (ASML) through the VizualStocks API.

ASML32 metric seriesCatalog checked 2026-10-28

Active metrics 31

SEGMENT

Arf Dry Net System Sales Revenue

Revenue from ASML deep-ultraviolet lithography systems that use 193-nanometer argon-fluoride light without an immersion-water layer. Chipmakers use these dry systems for less demanding layers where their resolution and cost are a better fit than immersion or EUV tools.

arfDryNetSystemSalesRevenue
Frequency
quarterly / annual
Reported history
Q4'14 — Q4'25
History endpoint
COMPANY KPI

Arf Dry Net System Sales Units

Number of ASML 193-nanometer argon-fluoride dry lithography systems recognized in revenue during the period. These tools print less demanding chip layers without the water-based optics used by higher-resolution immersion systems.

arfDryNetSystemSalesUnits
Frequency
quarterly / annual
Reported history
Q1'14 — Q3'26
History endpoint
SEGMENT

Arf Immersion Net System Sales Revenue

Revenue from ASML deep-ultraviolet lithography systems that project 193-nanometer argon-fluoride light through a thin layer of water between the lens and wafer. Immersion optics raise resolution beyond dry systems, allowing chipmakers to print finer features on advanced layers.

arfImmersionNetSystemSalesRevenue
Frequency
quarterly / annual
Reported history
Q4'14 — Q4'25
History endpoint
COMPANY KPI

Arf Immersion Net System Sales Units

Number of ASML argon-fluoride immersion lithography systems recognized in revenue during the period. These tools use water between the projection lens and wafer to print finer chip features than dry deep-ultraviolet systems.

arfImmersionNetSystemSalesUnits
Frequency
quarterly / annual
Reported history
Q1'14 — Q3'26
History endpoint
SEGMENT

China Revenue

Annual net sales attributed to systems shipped to China.

chinaRevenue
Frequency
quarterly / annual
Reported history
Q4'14 — Q4'25
History endpoint
SEGMENT

Europe Middle East And Africa Revenue Including Netherlands

Annual net sales attributed to systems shipped to Europe, the Middle East and Africa, including the Netherlands.

europeMiddleEastAndAfricaRevenueIncludingNetherlands
Frequency
quarterly / annual
Reported history
Q4'14 — Q4'25
History endpoint
SEGMENT

Euv Net System Sales Revenue

Revenue from ASML extreme-ultraviolet lithography systems, which use 13.5-nanometer light and reflective optics in a vacuum to print the smallest features on advanced logic and memory chips. EUV's much shorter wavelength reduces the number of patterning steps needed for leading-edge layers.

euvNetSystemSalesRevenue
Frequency
quarterly / annual
Reported history
Q4'14 — Q4'25
History endpoint
COMPANY KPI

Euv Net System Sales Units

Number of ASML extreme-ultraviolet lithography systems recognized in revenue during the period. These 13.5-nanometer tools print the most advanced logic and memory chip layers and include both NXE and High-NA EXE platforms when sold.

euvNetSystemSalesUnits
Frequency
quarterly / annual
Reported history
Q1'14 — Q3'26
History endpoint
SEGMENT

I Line Net System Sales Revenue

Revenue from ASML i-line lithography systems, which use 365-nanometer ultraviolet light to print mature, less complex chip layers. The technology predates deep-ultraviolet and EUV tools and is used where leading-edge resolution is unnecessary.

iLineNetSystemSalesRevenue
Frequency
quarterly / annual
Reported history
Q4'14 — Q4'25
History endpoint
COMPANY KPI

I Line Net System Sales Units

Number of ASML i-line lithography systems recognized in revenue during the period. These 365-nanometer ultraviolet tools serve mature and less demanding chip-production layers.

iLineNetSystemSalesUnits
Frequency
quarterly / annual
Reported history
Q1'14 — Q3'26
History endpoint
SEGMENT

Japan Revenue

Annual net sales attributed to systems shipped to Japan.

japanRevenue
Frequency
quarterly / annual
Reported history
Q4'14 — Q4'25
History endpoint
SEGMENT

Krf Net System Sales Revenue

Revenue from ASML deep-ultraviolet lithography systems that use 248-nanometer krypton-fluoride lasers. KrF tools print mature and supporting chip layers that need more resolution than i-line systems but not the capabilities of ArF immersion or EUV.

krfNetSystemSalesRevenue
Frequency
quarterly / annual
Reported history
Q4'14 — Q4'25
History endpoint
COMPANY KPI

Krf Net System Sales Units

Number of ASML krypton-fluoride deep-ultraviolet lithography systems recognized in revenue during the period. These 248-nanometer tools are used for mature and supporting layers across a wide range of chips.

krfNetSystemSalesUnits
Frequency
quarterly / annual
Reported history
Q1'14 — Q3'26
History endpoint
SEGMENT

Logic Net System Sales Revenue

Annual net system sales revenue from systems sold for logic end-use applications.

logicNetSystemSalesRevenue
Frequency
quarterly / annual
Reported history
Q4'16 — Q2'26
History endpoint
COMPANY KPI

Logic Net System Sales Units

Annual number of net systems sold for logic end-use applications.

logicNetSystemSalesUnits
Frequency
quarterly / annual
Reported history
Q4'16 — Q4'25
History endpoint
SEGMENT

Memory Net System Sales Revenue

Annual net system sales revenue from systems sold for memory end-use applications.

memoryNetSystemSalesRevenue
Frequency
quarterly / annual
Reported history
Q4'16 — Q2'26
History endpoint
COMPANY KPI

Memory Net System Sales Units

Annual number of net systems sold for memory end-use applications.

memoryNetSystemSalesUnits
Frequency
quarterly / annual
Reported history
Q4'16 — Q4'25
History endpoint
SEGMENT

Metrology And Inspection Net System Sales Revenue

Revenue from ASML YieldStar optical metrology and HMI electron-beam systems that measure wafer-pattern alignment, dimensions and defects. Chipmakers use the measurements to control production processes and improve the share of functioning chips on each wafer.

metrologyAndInspectionNetSystemSalesRevenue
Frequency
quarterly / annual
Reported history
Q4'15 — Q4'25
History endpoint
COMPANY KPI

Metrology And Inspection Net System Sales Units

Number of ASML optical metrology and electron-beam inspection systems recognized in revenue during the period. These tools measure pattern placement and dimensions and locate defects so chipmakers can control processes and improve wafer yield.

metrologyAndInspectionNetSystemSalesUnits
Frequency
quarterly / annual
Reported history
Q4'15 — Q4'25
History endpoint
SEGMENT

Net System Sales Revenue

Net sales revenue from lithography, metrology and inspection systems during the period.

netSystemSalesRevenue
Frequency
quarterly / annual
Reported history
Q1'14 — Q3'26
History endpoint
COMPANY KPI

New Lithography System Sales Units

Count of new lithography systems recognized in net system sales reported by ASML Holding NV during the period. This is activity over the reporting period rather than a period-end population.

newLithographySystemSalesUnits
Frequency
quarterly / annual
Reported history
Q1'14 — Q3'26
History endpoint
SEGMENT

New System Sales Revenue

Annual net system sales revenue from new systems.

newSystemSalesRevenue
Frequency
quarterly / annual
Reported history
Q4'14 — Q4'25
History endpoint
SEGMENT

Other Revenue By Geography

Revenue ASML Holding NV reports for geographic markets not separately disclosed in its geographic revenue breakdown during the period, measured in euros.

otherRevenueByGeography
Frequency
quarterly / annual
Reported history
Not specified — Not specified
History endpoint
SEGMENT

Rest Of Asia Revenue

Annual net sales attributed to systems shipped to Asian markets other than China, Japan, Singapore, South Korea and Taiwan.

restOfAsiaRevenue
Frequency
quarterly / annual
Reported history
Q4'14 — Q4'25
History endpoint
SEGMENT

Service And Field Option Revenue

Revenue from maintaining, repairing and upgrading ASML lithography systems already operating in customer fabs, including field-installed options that improve capacity or performance. ASML also calls this Installed Base Management sales, so it grows with the size and use of the installed fleet as well as upgrade activity.

serviceAndFieldOptionRevenue
Frequency
quarterly / annual
Reported history
Q1'14 — Q3'26
History endpoint
SEGMENT

Singapore Revenue

Annual net sales attributed to systems shipped to Singapore.

singaporeRevenue
Frequency
quarterly / annual
Reported history
Q4'14 — Q4'25
History endpoint
SEGMENT

South Korea Revenue

Annual net sales attributed to systems shipped to South Korea.

southKoreaRevenue
Frequency
quarterly / annual
Reported history
Q4'14 — Q4'25
History endpoint
SEGMENT

Taiwan Revenue

Annual net sales attributed to systems shipped to Taiwan.

taiwanRevenue
Frequency
quarterly / annual
Reported history
Q4'14 — Q4'25
History endpoint
SEGMENT

United States Revenue

Annual net sales attributed to systems shipped to the United States.

unitedStatesRevenue
Frequency
quarterly / annual
Reported history
Q4'14 — Q4'25
History endpoint
COMPANY KPI

Used Lithography System Sales Units

Count of used lithography systems recognized in net system sales reported by ASML Holding NV during the period. This is activity over the reporting period rather than a period-end population.

usedLithographySystemSalesUnits
Frequency
quarterly / annual
Reported history
Q1'14 — Q3'26
History endpoint
SEGMENT

Used System Sales Revenue

Annual net system sales revenue from used systems.

usedSystemSalesRevenue
Frequency
quarterly / annual
Reported history
Q4'14 — Q4'25
History endpoint

Discontinued historical metrics 1

COMPANY KPI

Net Bookings

Value of system sales orders and inflation-related adjustments accepted during the quarter.

netBookings
Frequency
quarterly / annual
Reported history
Q1'14 — Q4'25
History endpoint